Inspection apparatus
US10352869B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 5, 2017 |
| Grant date | Jul 16, 2019 |
| Priority date | — |
| Expiry date | Oct 27, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/10152
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus includes an illumination device including an arch-like lighting unit that is provided around an inspection target in a circular arc form and emits light toward the inspection target, imaging devices that capture images of a light reflection surface of the inspection target by which the light emitted from the arch-like lighting unit is reflected, and a determination device that inspects the light reflection surface of the inspection target on the basis of the images captured by the imaging devices. As a result, the inspection apparatus provides an effect of preventing the apparatus from being increased in size.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.