Patent · US Active

Ultrasensitive sensor based on a piezoelectric transistor

US10352888B2 · kind B2 · utility

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8References
8Claims
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Key dates

Filing dateDec 19, 2017
Grant dateJul 16, 2019
Priority date
Expiry dateDec 19, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N99/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Chemical sensors and methods of using and making the same include a functionalized electrode configured to change surface potential in the presence of an analyte. A piezoelectric element is connected to the functionalized electrode and is configured to change in volume in accordance with the surface potential of the functionalized electrode. A piezoresistive element is in contact with the piezoelectric element and is configured to change in resistance in accordance with the volume of the piezoelectric element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.