Patent · US Active

Acoustic resonator devices and methods providing patterned functionalization areas

US10352904B2 · kind B2 · utility

3Cited by
5References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 26, 2016
Grant dateJul 16, 2019
Priority date—
Expiry dateJan 5, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2291/0426
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A micro-electrical-mechanical system (MEMS) resonator device includes a top side electrode overlaid with an interface layer including a material having a surface (e.g., gold or other noble metal, or a hydroxylated oxide) that may be functionalized with a functionalization (e.g., specific binding or non-specific binding) material. The interface layer and/or an overlying blocking material layer are precisely patterned to control locations of the interface layer available to receive a self-assembled monolayer (SAM), thereby addressing issues of misalignment and oversizing of a functionalization zone that would arise by relying solely on microarray spotting. Atomic layer deposition may be used for deposition of the interface layer and/or an optional hermeticity layer. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.