Apparatus, method, and program for component measurement
US10352950B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2016 |
| Grant date | Jul 16, 2019 |
| Priority date | — |
| Expiry date | Jun 16, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2333/908
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a component measuring apparatus configured to determine a functional form that describes wavelength characteristics of a variation attributable to scattering (S (λ)). The apparatus then determines unknown one or more coefficients (p, q) based on a first relational expression that involves a variation attributable to absorption (H (λ1)) and a group of second relational expressions that do not involve variations attributable to absorption (H (λ2a), H (λ2b), H (λ2c)). The apparatus then corrects an absorbance measured at an arbitrary wavelength (λ) using a function where the one or more coefficients (p, q) are applied to the functional form so as to reduce or eliminate at least the effects of scattering of light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.