Dynamic sweep-plow microcantilever device and methods of use

US10352963B2 · kind B2 · utility

Assignee

• The Board of Trustees of The University of Alabama · US

Inventors

• Ehsan Omidi · Tuscaloosa, US
• Nima Mahmoodi · Tuscaloosa, US

Key dates

• Filing date: Dec 22, 2016
• Grant date: Jul 16, 2019
• Expiry date: Dec 26, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q80/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Implementations include a dynamic sweep-plow microcantilever (DSPM) device for nano-machining, nano-manufacturing, and nano-imaging using SPMs (e.g., an AFM). The DSPM device includes two elongated cantilevered arms that are spaced apart at their proximal ends and on which a piezoelectric layer is disposed. The distal ends of the arms are coupled together, and a distal tip is coupled to the distal ends and extends below a plane that includes a lower surface of the arms. The DSPM device is mounted on the AFM and applies nano-machining force through vibration that is induced by the piezoelectric layers on the arms. The DSPM device can vibrate such that the tip undergoes one or both of bending and torsional vibrations, which allows the DSPM device to perform both plowing and/or sweeping in nano-scale. The piezoelectric layers can be used for sensing by collecting vibrational feedback at the distal tip using a laser sensor.