Method of passivating and encapsulating III-V surfaces
US10355150B2 · kind B2 · utility
1Cited by
4References
9Claims
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Key dates
| Filing date | Jun 28, 2016 |
| Grant date | Jul 16, 2019 |
| Priority date | — |
| Expiry date | Dec 14, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
Abstract
A method for producing a surfaced passivated, encapsulated surface III-V type II superlattice (T2SL) photodetector, more specifically a p-type heterojunction device by cleaning, etching and exposing the surface of a III/V material to solution mixtures which simultaneously removes oxides from the surface and encapsulates the surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.