Laser machining systems and methods
US10357848B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2015 |
| Grant date | Jul 23, 2019 |
| Priority date | — |
| Expiry date | Nov 12, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser machining method includes directing, from an F-theta lens having a long focal length of greater than about 250 millimeters, a laser beam at a non-perpendicular beam tilt angle from an optical axis of the lens having a top-hat profile and a narrow beam divergence angle of between about 1 degree and about 3 degrees towards a workpiece on a stage movable in at least an X-direction and a Y-direction, engaging the directed laser beam with the workpiece disposed in the usable field of view, moving the workpiece and the directed laser beam relative to each other, and removing portions of the workpiece with the directed laser beam to define a machined surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.