Thin film strain gauge
US10359325B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 15, 2017 |
| Grant date | Jul 23, 2019 |
| Priority date | — |
| Expiry date | Sep 23, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A strain gauge includes: a substrate; a dielectric layer on the substrate; a thin film electrical circuit on the dielectric layer and having input/output terminals; other layers disposed on the electrical circuit; the dielectric layer forming a first seal on one side of the electrical circuit, the other layers forming a second seal on a second side of the electrical circuit, the first and second seals having structure such that: in a first instance prior to exposure of the strain gauge to an autoclave cycle, the electrical circuit is productive of a first output voltage in response to a first input voltage; and in a second instance subsequent to exposure of the strain gauge to at least 25 autoclave cycles, the electrical circuit is productive of a second output voltage in response to a second input voltage, the first and second input voltages being equal, and the first and second output voltages being equal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.