Computer system for processing heterogeneous measurements from various metrology apparatuses with a view to estimating values of features of microelectronic devices, corresponding method and computer program
US10359994B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2014 |
| Grant date | Jul 23, 2019 |
| Priority date | — |
| Expiry date | Mar 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8883
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A computer system processing heterogeneous measurements from various metrology apparatuses includes a processor, a storage, and a software platform. The storage includes a recording of direct models expressing the heterogeneous measurements as a function of predefined features of electronic devices or parameters for processing the measurements. The software platform includes a functional cost calculation module and an interface selecting one of plural cost functions. The functional module provides an estimation of a cost by comparison of the heterogeneous measurements with an estimation of the measurements obtained by an application of the direct models to values of predefined features or processing parameters. The software platform includes a functional solver module and an interface selecting one of plural solvers, for an iterative optimization by the solver of the values based on the output of the cost calculation module and by inversion of the direct models.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.