Differential MEMS microphone
US10362408B2 · kind B2 · utility
10Cited by
17References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2017 |
| Grant date | Jul 23, 2019 |
| Priority date | — |
| Expiry date | Mar 17, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2410/05
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates generally to microphones and related components. One example micro electro mechanical system (MEMS) motor includes a first diaphragm; a second diaphragm that is disposed in generally parallel relation to the first diaphragm, the first diaphragm and second diaphragm forming an air gap there between; and a back plate disposed in the air gap between and disposed in generally parallel relation to the first diaphragm and the second diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.