Method of forming space for use in analysis devices
US10364142B2 · kind B2 · utility
0Cited by
2References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 27, 2017 |
| Grant date | Jul 30, 2019 |
| Priority date | — |
| Expiry date | Sep 15, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0195
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of forming a space includes a step of tenting, on a substrate having a recessed portion, a dry film including a dry film material that is to be a top plate on the recessed portion. The step of tenting the dry film includes a press period and a release period and performs a press-release cycle of the press period and the release period a plurality of times, a pressed state in which the dry film is pressed against the substrate by using a pressing member is maintained during the press period, and a released state in which the pressed state is released is maintained during the release period.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.