Hermetically sealed package for mm-wave molecular spectroscopy cell
US10364144B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2017 |
| Grant date | Jul 30, 2019 |
| Priority date | — |
| Expiry date | Jan 13, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03L7/26
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Disclosed examples provide gas cells and a method of fabricating a gas cell, including forming a cavity in a first substrate, forming a first conductive material on a sidewall of the cavity, forming a glass layer on the first conductive material, forming a second conductive material on a bottom side of a second substrate, etching the second conductive material to form apertures through the second conductive material, forming conductive coupling structures on a top side of the second substrate, and bonding a portion of the bottom side of the second substrate to a portion of the first side of the first substrate to seal the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.