Patent · US Active

Probe card for a magnetically-actuable device and test system including the probe card

US10364147B2 · kind B2 · utility

4Cited by

4References

20Claims

0Family size

Assignee

STMicroelectronics SA

Inventors

Marco Rossi · Aicurzio, IT
Sergio Mansueto Reina · Cascina Portalupa, IT
Giacomo Calcaterra · Dalmine, IT

Key dates

Filing date	Aug 28, 2017
Grant date	Jul 30, 2019
Priority date	—
Expiry date	Sep 30, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2889
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe card fits in a system for testing a micro-electro-mechanical device having an element sensitive to a magnetic field. The probe card is formed by a PCB having a through-opening and probe tips for electrically contacting the micro-electro-mechanical device. A housing structure is received within the through-opening. The housing structure includes a planar peripheral region surrounding seats that protrude and extend at least partly into the through-opening. Magnetic elements are arranged in the seats, with the magnetic elements configured to generate a test magnetic field for testing operation of the micro-electro-mechanical device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.