Gas supply pipe, and gas treatment equipment
US10364498B2 · kind B2 · utility
3Cited by
13References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2015 |
| Grant date | Jul 30, 2019 |
| Priority date | — |
| Expiry date | May 19, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4584
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
According to one embodiment, a gas supply pipe has a first gas pipe configured to blow a gas which has flowed from an inflow opening via first gas blow holes arranged along a longitudinal direction, and a second gas pipe provided in parallel with the first gas pipe. The second gas pipe has second gas blow holes arranged along the longitudinal direction, and allows the gas to flow in a direction opposite to the first gas pipe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.