Laser process with controlled polarization
US10369663B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2015 |
| Grant date | Aug 6, 2019 |
| Priority date | — |
| Expiry date | Aug 19, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/56
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser system and method includes control of the direction of polarization of a laser beam that forms laser-induced channels in a substrate along a process path. Control of the direction of polarization is useful while forming laser-induced channels in substrate materials having a crystalline component. An optical element, such as a waveplate, imparts the laser beam with a direction of polarization that is controllable with respect to an axis of the substrate when the substrate is supported by the system for processing. The direction of polarization is changeable and controllable with respect to the direction of the process path and/or a crystalline plane of the substrate via movement of the optical element or the substrate or both.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.