Methods for gas generation in a sealed gas cell cavity
US10370760B2 · kind B2 · utility
6Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2017 |
| Grant date | Aug 6, 2019 |
| Priority date | — |
| Expiry date | Dec 15, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2201/09836
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
Described examples include a method of fabricating a gas cell, including forming a cavity in a first substrate, providing a nonvolatile precursor material in the cavity of the first substrate, bonding a second substrate to the first substrate to form a sealed cavity including the nonvolatile precursor material in the cavity, and activating the precursor material after or during forming the sealed cavity to release a target gas inside the sealed cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.