Quadrature compensation method for MEMS gyroscopes and a gyroscope sensor
US10371520B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2015 |
| Grant date | Aug 6, 2019 |
| Priority date | — |
| Expiry date | May 4, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/574
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a gyroscope sensor for detecting a rotational motion about a sensitivity axis and comprising means for quadrature compensation. The gyroscope sensor comprises a total inertial mass comprising a first inertial mass and a second inertial mass physically attached to each other and arranged such that a rotation of the first inertial mass about a detection axis caused by the coriolis force when the gyroscope sensor is subjected to a rotation about a sensitivity axis. The gyroscope further comprises a first drive structure having a displaceable drive frame which may cause a respective of the first or second inertial mass to rotate about the detection axis in order to compensate for quadrature errors originating from faulty coupling between a drive mode and a sense mode of the gyroscope sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.