Quantifying and reducing total measurement uncertainty
US10372114B2 · kind B2 · utility
0Cited by
6References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2016 |
| Grant date | Aug 6, 2019 |
| Priority date | — |
| Expiry date | Jun 16, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process control technique uses production data from multiple manufacturing tools and multiple inspection or metrology tools. Total measurement uncertainty (TMU) can be calculated on the production data, which can include measurements of one or more devices manufactured using the manufacturing tools. Manufacturing steps can be ranked or otherwise compared by TMU. All production modes and recipes can be continually monitored using production data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.