Patent · US Active

Micro-electro-mechanical system and method for producing the same

US10373790B2 · kind B2 · utility

0Cited by

6References

13Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Thomas Lisec · Itzehoe, DE
Fabian STOPPEL · Itzehoe, DE

Key dates

Filing date	Aug 12, 2016
Grant date	Aug 6, 2019
Priority date	—
Expiry date	Oct 31, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/2042
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A micro-electro-mechanical system includes a deflectable actuator plate and an abutment area. An integral piezoelectric functional layer of the deflectable actuator plate is configured across an area APS of the actuator plate. The deflectable actuator plate is configured to effect a hollow warp in at least a controlled or non-controlled state, wherein the abutment area is disposed facing a hollow side of the deflectable actuator plate defined by the hollow warp. The deflectable actuator plate is configured to provide, in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate and the abutment area. In the other state, the deflectable actuator plate is disposed spaced apart from the abutment area.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.