Patent · US Active

Semiconductor device and method for manufacturing the same

US10373833B2 · kind B2 · utility

1Cited by
0References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 29, 2016
Grant dateAug 6, 2019
Priority date
Expiry dateFeb 29, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/257
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device of an embodiment includes a first GaN-based semiconductor layer, a second GaN-based semiconductor layer provided on the first GaN-based semiconductor layer and having a larger bandgap than the first GaN-based semiconductor layer, a source electrode provided on the second GaN-based semiconductor layer, a drain electrode provided on the second GaN-based semiconductor layer, a recess provided between the source electrode and the drain electrode in the second GaN-based semiconductor layer, a gate insulating film provided on a surface of the recess, and a gate electrode provided on the gate insulating film and having an end portion in a gate width direction, located in the recess.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.