Piezoelectric device for ultrasonic sensor
US10374140B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2016 |
| Grant date | Aug 6, 2019 |
| Priority date | — |
| Expiry date | Sep 10, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2047
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A piezoelectric device includes a substrate with a cavity, a vibrating plate which is provided on the substrate so as to block an opening surface of the cavity, and a piezoelectric element which is provided on a surface of the vibrating plate opposite to the cavity, including a first electrode, a piezoelectric layer, and a second electrode, in which the second electrode has a laminated structure including a Pt layer (lower layer side electrode) and an Ir layer (upper layer side electrode), in which the Pt layer is in contact with the piezoelectric layer, and in which, if it is assumed that two directions which are parallel to a surface of the substrate and mutually perpendicular are defined as an X direction and a Y direction, the Ir layer is extended to an outside of the cavity at least in the X direction on an X-Y plane view.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.