Composition and molded article
US10377881B2 · kind B2 · utility
0Cited by
3References
12Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Feb 17, 2016 |
| Grant date | Aug 13, 2019 |
| Priority date | — |
| Expiry date | Feb 17, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08L83/10
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
The invention provides a composition capable of providing a molded article that has excellent heat resistance and a small weight change against both fluorine plasma exposure and oxygen plasma exposure during a semiconductor manufacturing step. The composition contains a fluorine-containing polymer and a cage silsesquioxane having a specific structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.