In-line type film forming apparatus and method of manufacturing magnetic recording medium using the same
US10381034B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2014 |
| Grant date | Aug 13, 2019 |
| Priority date | — |
| Expiry date | Aug 6, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/566
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided is an in-line type film forming apparatus including a processing chamber which is disposed to deviate from a closed path and is connected to a corner chamber, a first loading and unloading unit which unloads a substrate from a carrier and moves the substrate to the inside of the processing chamber, a second loading and unloading unit which unloads the substrate processed in the processing chamber and loads the substrate on the carrier, and a control device which performs control of driving the first and second loading and unloading units to unload the substrate from the carrier and to move the substrate to the inside of the processing chamber, and to take out the substrate processed in the processing chamber in advance from the processing chamber and to load the substrate on the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.