Target for ultraviolet light generation, and method for manufacturing same
US10381215B2 · kind B2 · utility
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Key dates
| Filing date | Jun 6, 2016 |
| Grant date | Aug 13, 2019 |
| Priority date | — |
| Expiry date | Jun 6, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J63/06
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A target for ultraviolet light generation 20A includes a sapphire substrate 21 that transmits ultraviolet light UV, an interlayer 22 that is in contact with the sapphire substrate 21, includes oxygen atoms and aluminum atoms in a composition, and transmits ultraviolet light UV, and a luminous layer 23 that is provided on the interlayer 22, includes oxide crystals containing rare earth elements to which an activator agent is added, and receives electron beams EB so as to generate ultraviolet light UV.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.