Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
US10381257B2 · kind B2 · utility
0Cited by
3References
26Claims
0Family size
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Inventors
Key dates
| Filing date | Aug 31, 2015 |
| Grant date | Aug 13, 2019 |
| Priority date | — |
| Expiry date | Aug 31, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67781
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.