Patent · US Active

Capacitor

US10381337B2 · kind B2 · utility

1Cited by
9References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 4, 2017
Grant dateAug 13, 2019
Priority date
Expiry dateDec 4, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/19106
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A capacitor includes a plurality of cells each including a capacitance formation portion in which a plurality of trenches are positioned and a margin portion disposed around the capacitance formation portion. The cell includes three or more dielectric layers disposed in the capacitance formation portion and extending in the trenches, and three or more electrode layers sequentially stacked with dielectric layers interposed therebetween and extending in the trenches. At least first and second electrode layers have opposite polarities and each include a lead electrode extending from the capacitance formation portion to the margin portion. A lead electrode of the first electrode layer is disposed in a first region disposed to one side of a central portion of a cell, and a lead electrode of the second electrode layer is disposed in a second region disposed on another side of a central portion of the cell.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.