Deposition apparatus and method of manufacturing organic light-emitting diode display apparatus using the same
US10381602B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 29, 2016 |
| Grant date | Aug 13, 2019 |
| Priority date | — |
| Expiry date | Nov 5, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposition apparatus includes a chamber, a stage, a mask, a chuck, a deposition source, a laser generator, and an optical assembly. The stage is supported in the chamber. The mask is disposed on the stage. The mask includes a deposition pattern. The chuck is configured to support a substrate in the chamber. The chuck is configured to position the substrate to overlap the deposition pattern. The deposition source is disposed in the chamber. The deposition source is configured to provide a deposition material toward the substrate. The laser generator is configured to generate a laser beam. The optical assembly is configured to guide the laser beam between the mask and the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.