Patent · US Active

Micro heating plate device and sensor having a micro heating plate device

US10383177B2 · kind B2 · utility

0Cited by

3References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Christoph Schelling · Stuttgart, DE
Richard Fix · Gerlingen, DE

Key dates

Filing date	Jul 21, 2014
Grant date	Aug 13, 2019
Priority date	—
Expiry date	Oct 14, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH05B3/66
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micro-hotplate apparatus including a diaphragm carrier device; a diaphragm that at least in part spans at least one cavity embodied in the diaphragm carrier device; and at least one heating conductor disposed on and/or in the diaphragm, the micro-hotplate apparatus additionally encompassing at least one reflector element that is disposed on an inner side, directed toward the cavity, of the diaphragm, in such a way that by way of the at least one reflector element a thermal radiation emitted from the at least one heating conductor and/or from the diaphragm is reflectable at least in part back onto and/or into the diaphragm. A sensor having a micro-hotplate apparatus is also described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.