Micro-emitters for electrospray systems
US10384810B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 15, 2015 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Jan 27, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB64G1/413
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Micro-emitter arrays and methods of microfabricating such emitter arrays are provided. The microfabricated emitter arrays incorporate a plurality of emitters with heights greater than 280 microns with uniformity of +/−10 microns arranged on a supporting silicon substrate, each emitter comprising an elongated body extending from the top surface of the substrate and incorporating at least one emitter tip on the distal end of the elongated body thereof. The emitters may be disposed on the substrate in an ordered array in an X by Y grid pattern, wherein X and Y can be any number greater than zero. The micro-emitter arrays may utilize a LMIS propellant source including, for example, gallium, indium, bismuth, or tin. The substrate may incorporate at least one through-via providing a fluid pathway for the LMIS propellant to flow from a propellant reservoir beneath the substrate to the top substrate surface whereupon the micro-emitter array is disposed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.