Chemical sensor with air via
US10386328B2 · kind B2 · utility
0Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 11, 2017 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Sep 11, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2300/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.