Detection circuit, electrostatic holding device and method for detecting a component on an electrostatic holding device

US10388551B2 · kind B2 · utility

Assignee

• BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO. · DE

Inventors

• Peter Preuss · Munich, DE
• Gunnar Heinze · Hofgeismar, DE
• Michael Fall · Berlin, DE
• Alexander Stein · Berlin, DE

Key dates

• Filing date: Feb 10, 2017
• Grant date: Aug 20, 2019
• Expiry date: Mar 13, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H03L7/099
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Detection circuit for detecting electrical capacitance of electrode device in electrostatic holding device with clamp carrier, particularly for detecting component held by holding device, includes phase control circuit couplable to electrode device and has reference oscillator device, phase comparator and VCO circuit (VCOC). Phase comparator is arranged to generate a control voltage of VCOC as a function of reference signal from reference oscillator device and of VCO feedback signal from VCOC, at least one phase control circuit is configured for controlling VCOC as a function of capacitance to be detected, and for outputting an output signal characteristic of capacitance based on control voltage of VCOC, phase control circuit is configured for connection to electrode device such that VCOC contains capacitance to be detected as frequency-determining component, and reference oscillator device is configured for generating reference signal with adjustable reference frequency. Electrostatic holding device includes at least one such detection circuit.