Lateral voltage variable capacitor fabrication
US10388719B2 · kind B2 · utility
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11Claims
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Inventor
Key dates
| Filing date | Sep 9, 2017 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Sep 9, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/692
Abstract
Methods for fabricating a lateral voltage variable capacitor are disclosed. The voltage variable capacitor utilizes a dielectric material with an electric field dependent dielectric permittivity (dielectric constant). Various process steps are used including planarization to fabricate the lateral device structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.