Multi-wavelength detector array incorporating two dimensional and one dimensional materials

US10388805B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Michael Engel · Karlsruhe, DE
• Mathias B. Steiner · Rio de Janeiro, BR

Key dates

• Filing date: Jul 9, 2018
• Grant date: Aug 20, 2019
• Expiry date: Jul 9, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F77/413

Abstract

A method of forming a wavelength detector that includes forming a first transparent material layer having a uniform thickness on a first mirror structure, and forming an active element layer including a plurality of nanomaterial sections and electrodes in an alternating sequence atop the first transparent material layer. A second transparent material layer is formed having a plurality of different thickness portions atop the active element layer, wherein each thickness portion correlates to at least one of the plurality of nanomaterials. A second mirror structure is formed on the second transparent material layer.