Metal organic chemical vapor deposition apparatus for solar cell
US10388820B2 · kind B2 · utility
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4References
14Claims
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Key dates
| Filing date | Feb 2, 2016 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Jun 1, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4587
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A metal organic chemical vapor deposition apparatus for a solar cell includes a deposition unit. The deposition unit includes a susceptor to be mounted with a substrate, and a shower head to prepare a reacting gas by mixing plural kinds of raw gases for deposition and supply the reacting gas to the susceptor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.