Methods of reducing electric loss in elastic wave elements
US10389326B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2017 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Aug 26, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/605
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus for reducing electric loss in an elastic wave element. In one example such a method includes forming an IDT electrode on a piezoelectric body, and forming the connection wiring on the piezoelectric body and electrically connecting the connection wiring to the IDT electrode. Forming the connection wiring includes sequentially forming a lower connection wiring on an upper surface of the piezoelectric body and forming an upper connection wiring over the lower connection wiring. The method further includes forming a reinforcement electrode over the connection wiring that divides the upper connection wiring into first and second upper connection wirings electrically connected to one another by the reinforcement electrode. The reinforcement electrode is formed abutting an upper surface of the lower connection wiring between the first and second upper connection wirings and electrically connected to the lower connection wiring and to the first and second upper connection wirings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.