Plate wave devices with wave confinement structures and fabrication methods
US10389332B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 17, 2015 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Oct 11, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/027
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A micro-electrical-mechanical system (MEMS) guided wave device includes a single crystal piezoelectric layer and at least one guided wave confinement structure configured to confine a laterally excited wave in the single crystal piezoelectric layer. A bonded interface is provided between the single crystal piezoelectric layer and at least one underlying layer. A multi-frequency device includes first and second groups of electrodes arranged on or in different thickness regions of a single crystal piezoelectric layer, with at least one guided wave confinement structure. Segments of a segmented piezoelectric layer and a segmented layer of electrodes are substantially registered in a device including at least one guided wave confinement structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.