Saw resonator having negative profile metal structure and manufacturing method thereof
US10389334B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Feb 7, 2017 |
| Grant date | Aug 20, 2019 |
| Priority date | — |
| Expiry date | Mar 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/5283
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A surface acoustic wave resonator includes: a piezoelectric substrate; a plurality of metal structures formed on a top surface of the piezoelectric substrate to have a negative profile; and a temperature compensation layer covering the top surface of the piezoelectric substrate and the plurality of metal structures. The surface acoustic wave resonator according to an embodiment of the present invention has a frequency characteristic insensitive to change of profile and has an effect of having a high semi-resonance Q value characteristic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.