Nanoporous silicon nitride membranes, and methods for making and using such membranes
US10391219B2 · kind B2 · utility
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3References
17Claims
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Key dates
| Filing date | Oct 13, 2017 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | Oct 13, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Provided are nanoporous silicon nitride membranes and methods of making such membranes. The membranes can be part of a monolithic structure or free-standing. The membranes can be made by transfer of the nanoporous structure of a nanoporous silicon or silicon oxide film by, for example, reactive ion etching. The membranes can be used in, for example, filtration applications, hemodialysis applications, hemodialysis devices, laboratory separation devices, multi-well cell culture devices, electronic biosensors, optical biosensors, active pre-concentration filters for microfluidic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.