Method and apparatus for implementing ultra-high stability long-vertical travel stage
US10393242B2 · kind B2 · utility
1Cited by
10References
13Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 31, 2016 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | Jul 1, 2037 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C29/005
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.