Micro-hemispherical resonators and methods of making the same
US10393525B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 22, 2015 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | Mar 16, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/2405
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Aspects of the present disclosure relate to microelectromechanical systems (MEMS) and methods for fabricating MEMS. In some embodiments, the system includes a resonator and a support stem. In some embodiments, the resonator is a hemisphere. The system can further include a front-side or back-side DC contact. The system can further include a levitation support, by which the resonator is virtually levitated from a substrate. In some embodiments, the resonator can be suitable for use in a microhemispherical resonator gyroscope Aspects of the present disclosure also relate to methods for fabricating axisymmetric resonators, including resonators for use in microhemispherical resonator gyroscopes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.