Controlled pulse generation methods and apparatuses for evaluating stiction in microelectromechanical systems devices

US10393618B2 · kind B2 · utility

Assignee

• NXP USA, Inc. · US

Inventors

• Peter T. Jones · Scottsdale, US
• Arvind S. Salian · Chandler, US
• William D. McWhorter · Goodyear, US
• Chad Krueger · Tempe, US
• John Shipman · Alexandria, US
• Michael Naumann · Feucht, DE
• Larry Dale Metzler · Brandon, US
• Tripti Regmi · Tempe, US

Key dates

• Filing date: Jun 22, 2016
• Grant date: Aug 27, 2019
• Expiry date: Aug 10, 2037

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/0235
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

Methods and apparatuses are provided for evaluating or testing stiction in Microelectromechanical Systems (MEMS) devices utilizing a mechanized shock pulse generation approach. In one embodiment, the method includes the step or process of loading a MEMS device, such as a multi-axis MEMS accelerometer, into a socket provided on a Device-Under-Test (DUT) board. After loading the MEMS device into the socket, a series of controlled shock pulses is generated and transmitted through the MEMS device utilizing a mechanized test apparatus. The mechanized test apparatus may, for example, repeatedly move the DUT board over a predefined motion path to generate the controlled shock pulses. In certain cases, transverse vibrations may also be directed through the tested MEMS device in conjunction with the shock pulses. An output of the MEMS device is then monitored to determine whether stiction of the MEMS device occurs during each of the series of controlled shock pulses.