Surface-enhanced raman scattering element and method for manufacturing same
US10393663B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Feb 10, 2016 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | Feb 10, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/651
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An SERS element includes a substrate, a fine structure portion formed on a surface of the substrate and having a plurality of pillars, and a conductor layer formed on the fine structure portion and constituting an optical functional portion that causes surface-enhanced Raman scattering. A groove is provided in an outer surface of each pillar. A plurality of gaps are formed in the conductor layer by forming the conductor layer on the outer surface of each pillar in a state in which at least a portion of an inner surface of the groove is exposed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.