Patent · US Active

Depositing a passivation layer on a graphene sheet

US10395928B2 · kind B2 · utility

3Cited by

2References

13Claims

0Family size

Assignee

Nanomedical Diagnostics, Inc. · US

Inventors

Deng Pan · San Diego, US
Brett R. Goldsmith · Philadelphia, US
Mitchell Lerner · San Diego, US

Key dates

Filing date	Jun 14, 2017
Grant date	Aug 27, 2019
Priority date	—
Expiry date	Jun 14, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB82Y10/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Embodiments of the disclosed technology include depositing a passivation layer onto a surface of a wafer that may include a graphene layer. The passivation layer may protect and isolate the graphene layer from electrical and chemical conditions that may damage the graphene layer. As such, the passivation layer may further protect the graphene sensor from being damaged and impaired for its intended use. Additionally, the passivation layer may be patterned to expose select areas of the graphene layer below the passivation layer, thus creating graphene wells and exposing the graphene layer to the appropriate chemicals and solutions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.