Substrate transfer apparatus and method of teaching substrate transfer robot
US10395956B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2017 |
| Grant date | Aug 27, 2019 |
| Priority date | — |
| Expiry date | Feb 28, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A controller: selects one optical sensor to use from among a first optical sensor and at least one second optical sensor; moves a substrate transfer hand to a detection start position at which an optical path of the selected optical sensor is positioned above a substrate placing portion and does not interfere with a pillar portion; lowers the substrate transfer hand from the detection start position to a detection position at which an object is detected by the optical sensor; and stores, as a height position of the substrate placing portion, a height of the optical path of the optical sensor from a predetermined positional reference when the substrate transfer hand is at the detection position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.