Vapor phase deposition system
US10400334B2 · kind B2 · utility
1Cited by
14References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2016 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | May 4, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/48
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A showerhead for vacuum deposition of several species, the showerhead being divided into several quarters containing each at least one outlet for the species, each quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contain different species.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.