Optical emission system including dichroic beam combiner
US10401221B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2017 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | Aug 20, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/1217
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.