Patent · US Active

Semiconductor device and method for manufacturing the same

US10403579B2 · kind B2 · utility

6Cited by
1References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 2, 2017
Grant dateSep 3, 2019
Priority date
Expiry dateNov 2, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/18161
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a semiconductor chip having an active surface having connection pads disposed thereon; an encapsulant encapsulating at least portions of the semiconductor chip, a connection member disposed on the active surface of the semiconductor chip and including a redistribution layer electrically connected to the connection pads, a passivation layer disposed on the connection member, and an under bump metallurgy (UBM) layer embedded in the passivation layer and electrically connected to the redistribution layer of the connection member. The UBM layer includes a UBM pad embedded in the passivation layer and having a recess portion, and a UBM via penetrating through a portion of the passivation layer and electrically connecting the redistribution layer of the connection member and the UBM pad to each other.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.