MEMS microphone maximum sound pressure level extension
US10405105B2 · kind B2 · utility
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1References
24Claims
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Key dates
| Filing date | Jan 19, 2017 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | Apr 9, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2410/07
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A micro electro-Mechanical System (MEMS) microphone includes a first back plate positioned on top of a first moving plate, wherein the first moving plate flexes in response to changes in air pressure caused by audio signals. The MEMS microphone also includes a valve comprising a valve moving plate, wherein a first end of the valve moving plate is fixedly attached to a MEMS die and the valve moving plate flexes in response to high sound pressure levels such that a second end of the valve moving plate enables airflow to prevent audio signal distortion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.