Production of polycrystalline silicon in substantially closed-loop processes that involve disproportionation operations
US10407309B2 · kind B2 · utility
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Key dates
| Filing date | Dec 24, 2014 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Mar 11, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/03
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Production of polycrystalline silicon in substantially closed-loop processes and systems is disclosed. The processes and systems generally involve disproportionation of trichlorosilane to produce silane or dichlorosilane and thermal decomposition of silane or dichlorosilane to produce polycrystalline silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.