Patent · US Active

Production of polycrystalline silicon in substantially closed-loop processes that involve disproportionation operations

US10407309B2 · kind B2 · utility

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16References
16Claims
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Inventors

Key dates

Filing dateDec 24, 2014
Grant dateSep 10, 2019
Priority date
Expiry dateMar 11, 2035

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC01B33/03
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

Production of polycrystalline silicon in substantially closed-loop processes and systems is disclosed. The processes and systems generally involve disproportionation of trichlorosilane to produce silane or dichlorosilane and thermal decomposition of silane or dichlorosilane to produce polycrystalline silicon.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.