Manufacturing method of heat flux sensor and heat flow generation device for use in the manufacturing method
US10408690B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2016 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Apr 20, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to a manufacturing method of a heat flux sensor, the heat flux sensor is sandwiched between a heater plate and a cooling unit. The heater plate is disposed on the first surface of the heat flux sensor, and the cooling unit is disposed on the second surface of the same. A heat radiation measurement plate is disposed on a surface of the heater plate opposite to the surface on which the heat flux sensor is disposed. According to this configuration, the temperature of the heater plate is controlled in an inspection process such that the heater plate is kept at an ambient temperature. This makes it possible to stabilize the temperature of the heater plate in a short time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.